Current time in Korea 04:22 Oct 23 (Mon) Year 2017 KCS KCS Publications
KCS Publications
My Journal Log In Register
HOME > Search > Browsing(BKCS) > Archives

Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 29, Number 2
BKCSDE 29(2)
February 20, 2008 

 
Title
The Strategy to Fabricate the MTiO3 (M = Sr, Ba) Thin Films by Laser Ablation
Author
T. M. Im, J. Y. Park, H. J. Kim, H. K. Choi, K. W. Jung*, D. Jung*
Keywords
Thin film, Laser ablation, Ferroelectrics, Crystallization
Abstract
BaTiO3 and SrTiO3 thin films were fabricated on Pt/Ti/SiO2/Si substrate by the pulsed laser deposition process. The dependence of the deposited film quality upon the partial oxygen pressure during the deposition process was importantly examined. Regardless of the oxygen pressure, the as-deposited films were not fully crystallized. However, the film deposited at low oxygen pressure became well crystallized after the annealing process. It was concluded, therefore, that the partial oxygen pressure is reduced as low as possible during the deposition process and then anneal the as-deposited samples at ambient pressure to fabricate the well crystallized SrTiO3 and BaTiO3 films by laser ablation.
Page
427 - 430
Full Text
PDF