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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 31, Number 8
BKCSDE 31(8)
August 20, 2010 

 
Title
DFT Study on the Gas Phase Decomposition of Tungsten Imido Guanidinate Complex W(NiPr)Cl3[iPrNC(NMe2)NiPr] for Chemical Vapor Deposition of Tungsten Carbonitride Films
Author
Yong Sun Won, Sung Soo Park*
Keywords
Tungsten nitride, Guanidinate, Diffusion barrier, Density functional theory
Abstract
No Abstract
Page
2416 - 2418
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